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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
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dc.contributor.advisor | 田維誠(Wei-Cheng Tian) | |
dc.contributor.author | Chun-Te Sun | en |
dc.contributor.author | 孫峻德 | zh_TW |
dc.date.accessioned | 2021-06-16T16:10:54Z | - |
dc.date.available | 2013-04-26 | |
dc.date.copyright | 2013-04-26 | |
dc.date.issued | 2013 | |
dc.date.submitted | 2013-02-20 | |
dc.identifier.citation | [1] G. Subcommittee, '1999 World Health Organization-International Society of Hypertension Guidelines for the Management of Hypertension,' Journal of Hypertension, vol. 17, pp. 151-183, 1999.
[2] World Health Organization (WHO), 'World Health Statistics,' 2012. [3] F. P. Cappuccio, S. M. Kerry, L. Forbes, and A. Donald, 'Blood Pressure Control By Home Monitoring: Meta-Analysis Of Randomised Trials,' BMJ: British Medical Journal, vol. 329, pp. 145-148, 2004. [4] R. Agarwal, J. E. Bills, T. J. W. Hecht, and R. P. Light, 'Role of Home Blood Pressure Monitoring in Overcoming Therapeutic Inertia and Improving Hypertension Control,' Hypertension, vol. 57, pp. 29-38, 2011. [5] B. Gupta, 'Invasive Blood Pressure Monitoring,' World Federation of Societies of Anaesthesiologists, 2007. [6] 'Peripheral arterial line,' MedilinePlus, ( http://www.nlm.nih.gov/medlineplus/ency/imagepages/19871.htm ), 2006 , Accessed on Aug. 25, 2012. [7] 'High Blood Pressure,' The Merck Manual, ( http://www.merckmanuals.com/home/heart_and_blood_vessel_disorders/high_blood_pressure/high_blood_pressure.html), 2007, Accessed on Aug. 25, 2012. [8] L. A. Geddes, 'Cardiovascular Devices and Their Applications,' Fig. 34-2, New York; John Wiley 1984. [9] G. L. Pressman and P. M. Newgard, 'A Transducer for the Continuous External Measurement of Arterial Blood Pressure,' IEEE Transactions on Bio-medical Electronics, vol. 10, pp. 73-81, 1963. [10] M. Koen and V. Pascal, 'Development and modelling of arterial applanation tonometry: A review,' Technology and Health Care, vol. 10, pp. 65-76, 2002. [11] J. D. Bronzino, 'The Biomedical Engineering Handbook,' Figure 71.6, CRC Press, 2000. [12] C. Liu, Foundations of MEMS: pp.207-239, Pearson Prentice Hall, 2006. [13] Samaun, K. D. Wise, and J. B. Angell, 'An IC Piezoresistive Pressure Sensor for Biomedical Instrumentation,' IEEE Transactions on Biomedical Engineering, vol.20, pp. 101-109, 1973. [14] E. L. SPOTTS and T. P. FRANK, 'A Disposable Blood Pressure Transducer System,' Journal of Clinical Engineering, vol. 7, pp. 197-200, 1982. [15] E. S. Kolesar, Jr. and C. S. Dyson, 'Object imaging with a piezoelectric robotic tactile sensor,' Journal of Microelectromechanical Systems, vol. 4, pp. 87-96, 1995. [16] Y. S. Lee and K. D. Wise, 'A batch-fabricated silicon capacitive pressure transducer with low temperature sensitivity,' IEEE Transactions on Electron Devices, vol. 29, pp. 42-48, 1982. [17] C. Hin-Leung and K. D. Wise, 'An ultraminiature solid-state pressure sensor for a cardiovascular catheter,' IEEE Transactions on Electron Devices, , vol. 35, pp. 2355-2362, 1988. [18] L. Rosengren, J. Soderkvist, and L. Smith, 'Micromachined sensor structures with linear capacitive response,' Sensors and Actuators A: Physical, vol. 31, pp. 200-205, 1992. [19] B. Puers, E. Peeters, A. Van Den Bossche, and W. Sansen, 'A capacitive pressure sensor with low impedance output and active suppression of parasitic effects,' Sensors and Actuators A: Physical, vol. 21, pp. 108-114, 1990. [20] H. Kim, Y.-G. Jeong, and K. Chun, 'Improvement of the linearity of a capacitive pressure sensor using an interdigitated electrode structure,' Sensors and Actuators A: Physical, vol. 62, pp. 586-590, 1997. [21] V. F. D Crescini, D Marioli, T Taroni, 'A thick-film capacitive pressure sensor with improved linearity due to electrode-shaping and frequency conversion,' Measurement Science and Technology, vol. 8, pp. 71-77, 1997. [22] S. Guo, J. Guo, and W. H. Ko, 'A monolithically integrated surface micromachined touch mode capacitive pressure sensor,' Sensors and Actuators A: Physical, vol. 80, pp. 224-232, 2000. [23] W. H. Ko and W. Qiang, 'Touch mode capacitive pressure sensors for industrial applications,' Proceedings of Tenth Annual International Workshop on Micro Electro Mechanical Systems, pp. 284-289, 1997. [24] H. T. K. Shah, V. Vibhute, J. Singh, H.P. Le, 'A MEMS Vertical Fringe Comb Capacitive Pressure Sensor for Biomedical Application,' Nanotech Conf., vol. 3, 2005. [25] Stephen Senturia, Microsystem Design, Kluwer Academic, 2003 [26] James M. Bustillo, Roger T. Howe, Richard S. Muller, 'Surface Micromachining for Microelectromechanical Systems', Proceedings of the IEEE, Vol. 86, No. 8, pp. 1552-1574, 1998. [27] John H. Lau, Flip chip technologies, McGraw-Hill, 1996. [28] Kenichiro Suzuki, Khalil Najafi, and Kensall D. Wise, ' A 1024-Element High-Performance Silicon Tactile Imager', IEEE Transactions on Electron Devices, Vol. 37, No. 8, pp. 1852-1860,1990. [29] Kunnyun Kim, Kang Ryeol Lee, and Dae Sung Lee et al., ' A silicon-based flexible tactile sensor for ubiquitous robot companion applications', J. Physics: Conf. 34, 2006, pp. 399-403. [30] Chunyan Li, Frank E sauser, Richard G Azizkhan, Chong H Ahn, Ian Papautsky , 'Polymer flip-chip bonding of pressure sensors on a flexible Kapton film for neonatal catheters', J. Micromech. Microeng., vol. 15, 2005, pp. 1729-1735. [31] Ingelin Clausen, Ola Sveen , 'Die separation and packaging of a surface micromachined piezoresistive pressure sensor', Sensors and Actuators A 133, pp. 457-466, 2007. [32] S. Timoshenko, Theory of Plates and Shells, McGraw-Hill Book Company, 1940. [33] V. Kaajakari, Practical MEMS, Small Gear Publishing, Small Gear Publishing, 2006. [34] J. Krejza, M. Arkuszewski, S. E. Kasner, J. Weigele, A. Ustymowicz, R. W. Hurst, B. L. Cucchiara, and S. R. Messe, 'Carotid Artery Diameter in Men and Women and the Relation to Body and Neck Size,' Stroke, vol. 37, pp. 1103-1105, April, 2006. [35] H. Gray,' Bartleby com's version of Henry Gray's Anatomy of the Human Body,' Figure3a, The Internal Cartotid Artery, Bartley com., 1918. [36] STMicroelectronics, 'LF351 Wide Bandwidth Single J-FET Operation Amplifier Datasheet' [37] Helmholtz-Zentrum, Nano-indenter: http://www.hzg.de/imperia/md/images/gkss/institut_fuer_werkstoffforschung/wme/wme_bilder_nanoindenter_smaller.jpg, Accessed on Aug. 27, 2012. [38] 張瑞慶, '奈米壓痕技術與應用,' 聖約翰科技大學機械系2006. [39] National Chip Implementation Center (CIC), White Light Interferometer: http://ems.cic.org.tw/ebs/equiIntroduction/equiIntroductionAction_doQuery.action, Accessed on Aug. 27, 2012. [40] http://www.mit.edu/~6.777/matprops/matprops.htm, Accessed on Aug. 27, 2012. [41] D. Roylance, Engineering Viscoelasticity, Massachusetts Institute of Technology, 2001. | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/62803 | - |
dc.description.abstract | 本研究開發出一種應用於血壓量測的線性響應電容式觸壓感測器。研究首先使用有限元素法模擬得到結構最佳化的三組懸臂設計,並採用一組傳統平板電容結構以作對照。製程採用TSMC 0.35μm CMOS-MEMS製程,結合自行開發的金屬溼蝕刻後製程完成元件開發。量測採用阻抗分析儀(Impedance analyzer)進行理論驗證,再配合RC鬆弛振盪器(RC relaxation oscillator)、電容-電壓轉換器(Capacitance-Voltage converter)兩應用電路量測。量測結果顯示本研究的三組線性響應設計,均具有較高的線性度,此感測器性能可達到0.990的線性度(非線性度4.91% ),消除傳統式平板電容62.97%的非線性度(從13.26%至4.91%),同時提高36.36%的感測範圍(從165mmHg至225mmHg),並有效降低因多層結構內部殘餘應力造成的翹曲現象。本研究並採用覆晶封裝(flip-chip packaging)對元件結構進行封裝,初步功能性測試結果顯示封裝電性正常。 | zh_TW |
dc.description.abstract | A linear-response capacitive tactile sensor for blood pressure measurement was developed in this work. FEM (Finite Element Method) simulation was utilized to obtain three optimized structure designs, with one conventional parallel plate capacitor design for comparison. The TSMC 0.35μm CMOS-MEMS process along with the self-developed metal wet-etching process was employed to realize the structure. The sensor was measured by the impedance analyzer for theoretical verification. Two discrete electronic circuits, the RC relaxation oscillator and the capacitance-voltage converter were used to measure the response. Measurement results showed that the three linear-response designs demonstrated higher linearity than the conventional one. The linearity was improved to 0.990 (nonlinearity 4.91%), which eliminated 62.97% of the nonlinearity in the conventional design (from 13.26% to 4.91%). In the meantime, the dynamic range was enhanced 36.36% (from 165 mmHg to 225mmHg). The buckling of the membrane due to the residual stress in the multi-layer structure was also alleviated. The packaging of the sensor was realized by the flip-chip packaging, and was proved to be successful by the preliminary functional test. | en |
dc.description.provenance | Made available in DSpace on 2021-06-16T16:10:54Z (GMT). No. of bitstreams: 1 ntu-102-R99943108-1.pdf: 3849159 bytes, checksum: f95d7b49e7ff3c139e5b1fa2b62041b4 (MD5) Previous issue date: 2013 | en |
dc.description.tableofcontents | 誌謝 i
中文摘要 ii Abstract iii CONTENTS iv LIST OF FIGURES vii LIST OF TABLES xiv Chapter 1 Introduction 1 1.1 Objective 1 1.2 General Overview of Blood Pressure Measurement 2 1.2.1 Invasive Blood Pressure Measurement 3 1.2.2 Noninvasive Blood Pressure Measurement 3 1.3 General Overview of Transducer Mechanism 7 1.3.1 Piezoresistive Sensing 8 1.3.2 Piezoelectric Sensing 9 1.3.3 Capacitive Sensing 10 1.4 Introduction to CMOS-MEMS technology 17 1.5 General Overview of Packaging for Pressure Sensors 19 1.5.1 Wire-bonding 22 1.5.2 Flip-chip bonding 24 1.6 Organization of this Work 28 Chapter 2 Design and Simulation of the Linear-Response Tactile Sensor 29 2.1 Principle of the Conventional Parallel Plate Type 29 2.2 Principle of the Linear-Response Type 32 2.3 Design of the Linear-Response Capacitive Tactile Sensor 34 2.3.1 The Sensing Structure 34 2.3.2 The Capacitance-Inverting Circuits 40 2.4 Simulation of Deflection and Capacitance to Pressure 42 2.4.1 Simulation of Deflection to Pressure 44 2.4.2 Simulation of Capacitance to Pressure 46 Chapter 3 Fabrication of the Linear-Response Capacitive Sensor 50 3.1 Fabrication Process of the Linear-Response Capacitive Tactile Sensor 50 3.2 Fabrication Results of the Linear-Response Capacitive Tactile Sensor 55 3.3 Fabrication Process of Packaging of the Linear-Response Capacitive Tactile Sensor 65 3.4 Fabrication Results of Packaging of the Linear-Response Capacitive Tactile Sensor 68 Chapter 4 Measurement Setup and Results 71 4.1 The Equipment 71 4.1.1 PZT actuator 71 4.1.2 Nano-indenter 71 4.1.3 Impedance Analyzer 73 4.1.4 White-Light Interferometer 73 4.1.5 Keithley 2700 multi-meter 74 4.2 Mechanical Properties of Capacitive Tactile Sensor 75 4.2.1 Structural Stiffness Measured by Nano-Indenter 75 4.2.2 Surface Profile Measured by White-Light Interferometer 77 4.3 Electrical Properties of Capacitive Tactile Sensor 78 4.3.1 Capacitance Response Measured by Impedance Analyzer 78 4.3.2 Frequency Response Measured by RC relaxation oscillator 84 4.3.3 Voltage Response Measured by C-V converter 87 4.3.4 Loading and Unloading Test 90 4.3.5 Functional Test on the Packaged Device 91 4.3.6 Discussion 92 Chapter 5 Conclusion and Future Work 97 5.1 Conclusion 97 5.2 Future Work 98 Reference 99 | |
dc.language.iso | en | |
dc.title | 應用於血壓量測之線性化電容式觸壓感測器 | zh_TW |
dc.title | A Linear-Response Capacitive Tactile Sensor
for Blood Pressure Measurement | en |
dc.type | Thesis | |
dc.date.schoolyear | 101-1 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 黃俊郎,呂家榮 | |
dc.subject.keyword | 電容式觸壓感測器,CMOS-MEMS製程,線性度,覆晶封裝, | zh_TW |
dc.subject.keyword | Capacitive tactile sensor,CMOS-MEMS process,Linearity,Flip-chip packaging, | en |
dc.relation.page | 103 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2013-02-20 | |
dc.contributor.author-college | 電機資訊學院 | zh_TW |
dc.contributor.author-dept | 電子工程學研究所 | zh_TW |
顯示於系所單位: | 電子工程學研究所 |
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