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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 張培仁,施文彬 | |
dc.contributor.author | Shih-Chieh Lin | en |
dc.contributor.author | 林士傑 | zh_TW |
dc.date.accessioned | 2021-06-16T10:46:21Z | - |
dc.date.available | 2013-08-17 | |
dc.date.copyright | 2013-08-17 | |
dc.date.issued | 2013 | |
dc.date.submitted | 2013-08-12 | |
dc.identifier.citation | Reference
[1] Ahn, Suk-kyun, et al. 'Stimuli-responsive polymer gels.' Soft Matter 4.6 (2008): 1151-1157. [2] Liu, C., H. Qin, and P. T. Mather. 'Review of progress in shape-memory polymers.' Journal of Materials Chemistry 17.16 (2007): 1543-1558. [3] Baughman, R. H. 'Conducting polymer artificial muscles.' Synthetic metals78.3 (1996): 339-353. [4] Shankar, Ravi, Tushar K. Ghosh, and Richard J. Spontak. 'Dielectric elastomers as next-generation polymeric actuators.' Soft Matter 3.9 (2007): 1116-1129. [5] Paquette, Jason W., and Kwang J. Kim. 'Ionomeric electroactive polymer artificial muscle for naval applications.' Oceanic Engineering, IEEE Journal of29.3 (2004): 729-737. [6] Pelrine, Ron, Roy Kornbluh, and Guggi Kofod. 'High‐Strain Actuator Materials Based on Dielectric Elastomers.' Advanced Materials 12.16 (2000): 1223-1225. [7] Jager, Edwin WH, et al. 'The cell clinic: closable microvials for single cell studies.' Biomedical microdevices 4.3 (2002): 177-187. [8] Ashley, Steven. 'Artificial muscles.' Scientific American 289.4 (2003): 52-59. [9] Kovacs, G., et al. 'Stacked dielectric elastomer actuator for tensile force transmission.' Sensors and Actuators A: Physical 155.2 (2009): 299-307. [10] Shahinpoor, Mohsen, and Kwang J. Kim. 'Ionic polymer–metal composites: IV. Industrial and medical applications.' Smart Materials and Structures 14.1 (2005): 197. [11] Bar-Cohen, Yoseph. 'Electroactive polymers as artificial muscles: A review.'Journal of Spacecraft and Rockets 39.6 (2002): 822-827. [12] Yoon, Seoung Gil, et al. 'Swelling and electroresponsive characteristics of interpenetrating polymer network hydrogels.' Polymer international 54.8 (2005): 1169-1174. [13] Bay, Lasse, et al. 'A conducting polymer artificial muscle with 12% linear strain.' Advanced Materials 15.4 (2003): 310-313. [14] Zhenyi, Ma, et al. 'High field electrostrictive response of polymers.' Journal of Polymer Science Part B: Polymer Physics 32.16 (1994): 2721-2731. [15] Elhami, K., et al. 'Electrostriction of the copolymer of vinylidene‐fluoride and trifluoroethylene.' Journal of applied physics 77.8 (1995): 3987-3990. [16] Cheng, Zhong-Yang, et al. 'P (VDF-TrFE)-based electrostrictive co/ter-polymers and their device performance.' SPIE's 8th Annual International Symposium on Smart Structures and Materials. International Society for Optics and Photonics, 2001. [17] Wissler, Michael, and Edoardo Mazza. 'Modeling and simulation of dielectric elastomer actuators.' Smart Materials and structures 14.6 (2005): 1396. [18] Wissler, Michael, and Edoardo Mazza. 'Electromechanical coupling in dielectric elastomer actuators.' Sensors and Actuators A: Physical 138.2 (2007): 384-393. [19] Pelrine, Ron, et al. 'High-speed electrically actuated elastomers with strain greater than 100%.' Science 287.5454 (2000): 836-839. [20] Kovacs, G., et al. 'Stacked dielectric elastomer actuator for tensile force transmission.' Sensors and Actuators A: Physical 155.2 (2009): 299-307. [21] Carpi, Federico, Claudio Salaris, and Danilo De Rossi. 'Folded dielectric elastomer actuators.' Smart Materials and Structures 16.2 (2007): S300. [22] Brochu, Paul, and Qibing Pei. 'Advances in dielectric elastomers for actuators and artificial muscles.' Macromolecular rapid communications 31.1 (2010): 10-36. [23] Anderson, Iain A., et al. 'A thin membrane artificial muscle rotary motor.'Applied Physics A 98.1 (2010): 75-83. [24] O’Brien, Benjamin M., et al. 'Dielectric elastomer switches for smart artificial muscles.' Applied Physics A 100.2 (2010): 385-389. [25] Xia, Feng, Srinivas Tadigadapa, and Q. M. Zhang. 'Electroactive polymer based microfluidic pump.' Sensors and Actuators A: Physical 125.2 (2006): 346-352. [26] Yang, Wen-Pei, and Lien-Wen Chen. 'The tunable acoustic band gaps of two-dimensional phononic crystals with a dielectric elastomer cylindrical actuator.'Smart Materials and Structures 17.1 (2008): 015011. [27] Jung, Kwangmok, Kwang J. Kim, and Hyouk Ryeol Choi. 'A self-sensing dielectric elastomer actuator.' Sensors and Actuators A: Physical 143.2 (2008): 343-351. [28] G. Kofod, Ph.D. Thesis, The Technical University of Denmark, (2001) [29] Wissler, Michael, and Edoardo Mazza. 'Modeling of a pre-strained circular actuator made of dielectric elastomers.' Sensors and Actuators A: Physical120.1 (2005): 184-192. [30] Zhang, Xuequn, et al. 'Effects of crosslinking, prestrain, and dielectric filler on the electromechanical response of a new silicone and comparison with acrylic elastomer.' Smart Structures and Materials. International Society for Optics and Photonics, 2004. [31] Choi, Hyouk Ryeol, et al. 'Effects of prestrain on behavior of dielectric elastomer actuator.' Smart Structures and Materials. International Society for Optics and Photonics, 2005. [32] Pelrine, Ronald E., Roy D. Kornbluh, and Jose P. Joseph. 'Electrostriction of polymer dielectrics with compliant electrodes as a means of actuation.'Sensors and Actuators A: Physical 64.1 (1998): 77-85. [33] Pamidighantam, Sayanu, et al. 'Pull-in voltage analysis of electrostatically actuated beam structures with fixed–fixed and fixed–free end conditions.'Journal of Micromechanics and Microengineering 12.4 (2002): 458. [34] Feng, Jiang-Tao, and Ya-Pu Zhao. 'Experimental observation of electrical instability of droplets on dielectric layer.' Journal of Physics D: Applied Physics41.5 (2008): 052004. [35] Lin, Shih-Chieh, Wen-Pin Shih, and Pei-Zen Chang. 'Microstructural dielectric elastomer actuator with uniaxial in-plane contraction.' Journal of Intelligent Material Systems and Structures 24.3 (2013): 347-356. [36] Rinaldi, Gino, Muthukumaran Packirisamy, and Ion Stiharu. 'Boundary characterization of microstructures through thermo-mechanical testing.' Journal of Micromechanics and Microengineering 16.3 (2006): 549-556. [37] Younis, M. I., and A. H. Nayfeh. 'A study of the nonlinear response of a resonant microbeam to an electric actuation.' Nonlinear Dynamics 31.1 (2003): 91-117. [38] Hu, Yuh-Chung, C. M. Chang, and S. C. Huang. 'Some design considerations on the electrostatically actuated microstructures.' Sensors and Actuators A: Physical 112.1 (2004): 155-161. [39] Gere, James M., and Stephen P. Timoshenko. 'Mechanics of materials PWS.' (1990). [40] Tilmans, Harrie AC, and Rob Legtenberg. 'Electrostatically driven vacuum-encapsulated polysilicon resonators: Part II. Theory and performance.' Sensors and Actuators A: Physical 45.1 (1994): 67-84. [41] Wang, T. M. 'Non-linear bending of beams with uniformly distributed loads.'International Journal of Non-Linear Mechanics 4.4 (1969): 389-395. | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/61098 | - |
dc.description.abstract | 在本論文中,具單軸共平面收縮之微加工介電彈性體致動器將被提出。同時也會製造及測試致動器並且提出其解析模型。本論文提出的致動器主要是由高分子組成並且利用微機電技術加工完成。當介電彈性體致動器被施加一偏壓時,靜電力將擠壓介電彈性體並因為其內建的微結構造成平面方向的收縮。此致動器由兩層電極、兩層彈性層及一個微結構層所組成。微結構層為柵狀結構並且當作界隔層以定義上下兩層彈性層之間的間隙。此柵狀結構同時決定了共平面的收縮方向。當施加的靜電力將上下兩層彈性層拉近,這兩層彈性層會向內彎曲並且縮短間隔物之間的距離。
本論文將展示兩種不同致動方式的致動器,其中包含彎曲及收縮的致動行為模式。致動器彎曲的致動行為可由設計不對稱的彈性層厚度來達成,相反地,對稱的彈性層厚度將使致動器具備收縮的致動模式。介電彈性體致動器的幾何尺寸(彈性層的厚度與間隔物之間的距離)對致動行為的影響將被探討。並且將以照相機、雷射測距儀及微量天秤量測致動器彎曲及收縮時的自由端撓度、收縮長度及致動力。 本研究以尤拉樑(Euler’s beam)模型及能量法為理論基礎,推導出介電彈性體致動器的撓度解析解,再利用此撓度解析解進一步求得致動器致動時的收縮長度及致動力,並同時以實驗及ANSYS模擬驗證所推導出的理論解析結果。 由於提出的微結構介電彈性體致動器具有輕量、可撓及相對於傳統介電彈性體致動器較低的驅動電壓等優點,因此可應用在人工肌肉上。 | zh_TW |
dc.description.abstract | In this dissertation, a micromachined dielectric elastomer actuator with uniaxial in-plane contraction was proposed. The modeling, fabrication and testing of the actuator were carried out. The proposed dielectric elastomer actuator was made of polymers by micro-electro-mechanical systems (MEMS) technique. When a bias voltage was applied, the resulting electrostatic force compressed the dielectric elastomer which then shrank in area due to its embedded microstructures. This actuator consisted of two electrode layers, two flexible layers and a microstructural layer, respectively. The microstructural layer possessed the grating patterns which served as the spacers to define the gap between the upper and the bottom flexible layers. The grating patterns also determined the direction of the in-plane contraction. When the applied electrostatic force pulled together the bottom and the upper flexible layers, these two layers bent inwardly and shortened the distance between the spacers.
Two actuation types of actuators were demonstrated, which were bending and contraction actuation behaviors. The design of the bending actuation was demonstrated utilizing the asymmetric thickness design of the flexible layers, on the other hand, the actuator with symmetric thickness design of the flexible layers shows contraction actuation. The geometric effects for the actuation behavior of the proposed dielectric elastomer actuator were discussed, including thickness of the flexible layer and the distance between the neighboring spaces. The actuator with bending actuation was measured by CCD camera to detect the free-end deflection, and the actuator with contraction actuation was measured by Laser detector and microbalance to obtain the contraction length and the actuation force. The analytical solution for the deflection of the proposed dielectric elastomer actuator subject to electrostatic loads is derived based on the Euler’s beam model and energy method. Then one can use the closed form solution of the deflection to derive the contraction length and actuation force of the proposed dielectric elastomer actuator. Furthermore, these solution results were verified by ANSYS simulation and experiment. The microstructural dielectric elastomer actuators with lightweight, flexible and relative low driving voltage compared to the conventional dielectric elastomer actuator were designed and demonstrated. Because of these characteristics, the actuators could further be used as artificial muscle. | en |
dc.description.provenance | Made available in DSpace on 2021-06-16T10:46:21Z (GMT). No. of bitstreams: 1 ntu-102-D96543017-1.pdf: 1752850 bytes, checksum: 58942655b111b24ebef4454526281247 (MD5) Previous issue date: 2013 | en |
dc.description.tableofcontents | Contents
謝誌 i 中文摘要 ii Contents v Tables xi Nomenclature xii Chapter 1 Introduction 1 1.1 Motivation 1 1.2 Literature Survey 2 1.2.1 Smart Materials 2 1.2.2 Dielectric Elastomer Actuator 4 1.3 Thesis Structure 8 Chapter 2 Theory, Design, and Simulation Method 10 2.1 Traditional Dielectric Elastomer Actuator Theoretical Introduction 10 2.2 Design of the Microstructural Dielectric Elastomer Actuator 12 2.2.1 Architectures of Microstructural Dielectric Elastomer Actuator 12 2.2.2 Operation Mechanism of Microstructural Dielectric Elastomer Actuator 13 2.2.3 Maxwell Stress 15 2.3 Simulation Modeling 17 Chapter 3 Microfabrication of Microstructural Dielectric Elastomer Actuator 21 3.1 Process Consideration of Manufactured Dielectric Elastomer Actuator 21 3.2 Process of Manufactured Dielectric Elastomer Actuator 22 3.2.1 Sacrificial Layer 22 3.2.2 Flexible Layer 23 3.2.3 Microstructural Layer 24 3.2.4 Electrode Layer 24 3.3 Microfabrication Process of Manufactured Dielectric Elastomer Actuator with Bending Actuation 25 3.4 Measuring System of Manufactured Dielectric Elastomer Actuator with Bending Actuation 30 3.5 Microfabrication Process of Manufactured Dielectric Elastomer Actuator with Uniaxial In-Plane Contraction 31 3.6 Measuring System of Manufactured Dielectric Elastomer Actuator with In-Plane Contraction 37 Chapter 4 Microstructural Dielectric Elastomer Atuator with Bending Actuation 40 4.1 Analysis Method of Microstructural Dielectric Elastomer Actuator with Bending Actuation 40 4.1.1 Key Factor of Characterizing Dielectric Elastomer Actuator 41 4.1.2 Analytical Modeling of Single Cell of Dielectric Elastomer Actuator 41 4.1.3 Analytical Modeling of Multi Cell of Dielectric Elastomer Actuator 49 4.2 Measured Results and Discussions 51 4.3 Brief Summary 60 Chapter 5 Microstructural Dielectric Elastomer Atuator with Uniaxial In-Plane Contraction 62 5.1 Analysis Method of Microstructural Dielectric Elastomer Actuator with Uniaxial In-Plane Contraction 62 5.1.1 Analytical Modeling of Single Cell of Dielectric Elastomer Actuator to Derive Contraction Length of DEA 63 5.1.2 Analytical Modeling of Single Cell of Dielectric Elastomer Actuator to Derive Actuation Force of DEA 69 5.1.3 Analytical Modeling of Multi Cell of Dielectric Elastomer Actuator 70 5.2 Measured Results and Discussions 71 5.2.1 Modified Coefficient of the Equivalent Torsional Stiffness 71 5.2.2 Microstructural Dielectric Elastomer Actuator with Uniaxial In-Plane Contraction 74 5.2.3 Contraction Length 76 5.2.4 Actuation Force 78 5.3 Brief Summary 80 Chapter 6 Conclusion and Future Work 81 6.1 Conclusion 81 6.2 Future Work 83 Reference 84 Appendix A 87 Appendix B 88 | |
dc.language.iso | en | |
dc.title | 具單軸共平面收縮之微結構介電彈性體致動器 | zh_TW |
dc.title | Microstructural Dielectric Elastomer Actuator with Uniaxial In-Plane Contraction | en |
dc.type | Thesis | |
dc.date.schoolyear | 101-2 | |
dc.description.degree | 博士 | |
dc.contributor.oralexamcommittee | 戴慶良,胡毓忠,李其源 | |
dc.subject.keyword | 介電彈性體致動器,微型加工,高分子,收縮, | zh_TW |
dc.subject.keyword | dielectric elastomer actuator,microfabrication,polymer,contraction, | en |
dc.relation.page | 88 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2013-08-12 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 應用力學研究所 | zh_TW |
顯示於系所單位: | 應用力學研究所 |
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