請用此 Handle URI 來引用此文件:
http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/50904
完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 顏家鈺(Jia-Yush Yen) | |
dc.contributor.author | Chi-Ju Wu | en |
dc.contributor.author | 吳季儒 | zh_TW |
dc.date.accessioned | 2021-06-15T13:05:35Z | - |
dc.date.available | 2021-07-26 | |
dc.date.copyright | 2016-07-26 | |
dc.date.issued | 2016 | |
dc.date.submitted | 2016-07-05 | |
dc.identifier.citation | [1] G. Song, J. Zhao, and J. De Abreu-Garcia, “Tracking control of a piezoceramic actuator with hysteresis compensation using inverse Preisach model,” IEEE/ASME Trans. Mechatronics, vol. 10, no. 2, pp.198-209, Apr. 2005.
[2] S. Mittal and C-H. Menq, “Hysteresis compensation in electromagnetic actuators through Preisach model inversion,” IEEE/ASME Trans. Mechatron., vol. 5, no. 4, pp. 394–409, 2000. [3] Y. Qin, Y. Tian, D. Zhang, B. Shirinzadeh and S. Fatikow “A novel direct inverse modeling approach for hysteresis compensation of piezoelectric actuator in feedforward applications,” IEEE/ASME Trans. Mechatronics, vol. 18, no. 3, pp.981-989, 2013. [4] F. Preisach, “Über die magnetische nachwirkung,” Zeitschrift für Physik, vol. 94, pp. 277-302, 1935. [5] I. D. Mayergoyz, Mathermatical Models from the mathematical and control theory points of view, J. Appl. Phys. vol. 57, pp. 3803-3805, 1985. [6] I. D. Mayergoyz, Mathermatical Models of Hysteresis, 1990 :Springer-Verlag. [7] I. D. Mayergoyz, “Dynamic preisach models of hysteresis,” IEEE Trans. Magn., vol. 24, no. 6, pp.2925 -2927, 1988. [8] Y. Bernard, E. Mendes, and F. Bouillault, “Dynamic hysteresis modeling based on Preisach model,” IEEE Trans. Magn., vol. 38, pp. 885–888, 2002. [9] S. Xiao and Y. Li, “Modeling and high dynamic compensating the rate-dependent hysteresis of piezoelectric actuators via a novel modified inverse preisach model,” IEEE Trans. Control Syst. Technol., 2013. [10] S. S. Aphale, S. Devasia, and S. O. R. Moheimani, “High-bandwidth control of a piezoelectric nanopositioning stage in the present of plant uncertainties,” Nanotechnology, vol. 19, pp. 125503-1–125503-9, 2008. [11] J. A. Yi, S. Chang and Y. T. Shen “Disturbance-observer-based hysteresis compensation for piezoelectric actuators,” IEEE/ASME Trans. Mechatronics, vol. 14, no. 4, pp.456 -464, 2009. [12] C. J. Kemf and S. Kobayashi, “Disturbance observer and feedforward design for a high-speed direct-drive positioning table,” IEEE Trans. Contr. Syst. Technol., vol. 7, pp.513-526, 1999. [13] S. M. Shahruz, “Performance enhancement of a class of nonlinear systems by disturbance observers,” IEEE/ASME Trans. Mechatronics, vol.5, no.3, pp. 319–323, Sep. 2000. [14] H. Shim and N. Jo, “An almost necessary and sufficient condition for robust stability of closed-loop systems with disturbance observer,” Automatica, vol. 45, pp. 296–299, 2009. [15] H. J. M. Adriaens, W. L. de Koning and R. Banning “Modeling piezoelectric actuators”, IEEE/ASME Trans. Mechatronics, vol. 5, no. 4, pp.331 -341, 2000. [16] L. S. Chen, J. Y. Yen, et al., “Precision Tracking of a Piezo-Driven Stage by Charge Feedback Control,” Precision Engineering, 2013. [17] Physik Instrumente Inc., The world of micro- and nanopositioning, 2005/2006. [18] Physik Instrumente GmbH, Tutorial: Piezoelectrics in Nanopositioning, Designing with Piezoelectric Actuators, 2009. [19] Piezomechanik, Low voltage co-fired multilayer stacks, rings and chips for actuation, pp. 21-23, 2004. [20] Q. Yao, Jingyan Dong and Placid M. Ferreira, 'A novel parallel-kinematics mechanisms for integrated, multi-axis nanopositioning: Part 2. Dynamics, control and performance analysis,' Precision Engineering, Vol. 32, Issue 1, pp.20-23, Jan. 2008. [21] Y. Tian, B. Shirinzadeh, and D. Zhang. 'Design and dynamics of a 3-DOF flexure-based parallel mechanism for micro/nano manipulation,' Microelectronic Engineering, Vol. 87, pp. 230-241, 2010. [22] Agilent Technologies Inc., “Chapter 7B Agilent 10705A Single Beam Interferometer,” in Laser and Optics User's Manual, 2002. [23] A. Visintin, “Mathematical models of hysteresis,” in The Science of Hysteresis, G. Bertotti and I. Mayergoyz, Eds. London, U.K.: Academic, 2006, pp. 1–123. [24] C. Y. Su, Y. Stepanenko, J. Svoboda, and T. Leung, “Robust adaptive control of a class of nonlinear systems with unknown backlash-like hysteresis,” IEEE Trans. Autom. Control,vol.45,no.12,pp.2427–2432, Dec. 2000. [25] L. Ljung, System Identification Toolbox—User's Guide, Mathworks, Sherborn, MA, 2003. [26] T. Katayama, Subspace Methods for System Identification, Springer, 2005. [27] M. Tomizuka, 'Zero phase error tracking algorithm for digital control,' Journal of dynamic systems, measurement, and control, Vol. 109, pp 65-68, 1987. [28] E. Gross, M. Tomizuka, and W. Messner. 'Cancellation of discrete time unstable zeros by feedforward control.' Journal of dynamic systems, measurement, and control, Vol. 116, pp. 33-38, 1994. [29] J. A. Butterworth, L. Y. Pao and D. Y. Abramovitch, “The effect of nonminimum-phase zero locations on the performance of feedforward model-inverse control techniques in discrete-time systems,” American Control Conference, 2008. [30] H. F Tsai, “Hysteresis compensation of piezoelectric-actuated stage by surface fitted inverse Preisach model and robust control,” Master thesis, Department of Mechanical Engineering, National Taiwan University, 2012. [31] C. Z. Jan, “Piezo-Stage Identification and Control Based on Non-Hysteretic Electromechanical with Charge input,” Master thesis, Department of Mechanical Engineering, National Taiwan University, 2013. [32] S. F. Wen, “Charge Feedback Hysteresis Disturbance Observer Design of a Multi-axis Piezo-actuated Stage,” Master thesis, Department of Mechanical Engineering, National Taiwan University, 2014. [33] L. S. Chen, “Sensorless Precision Motion Control of a Multi-axis Piezo-actuated Stage,” Ph.D. dissertation, Department of Mechanical Engineering, National Taiwan University, 2013. [34] F. C. Wang, L. S. Chen, Y. C. Tsai, C. H. Hsieh and J. Y. Yen, “Robust loop-shaping control for a nano-positioning stage,” Journal of Vibration and Control, 2013. [35] S. T. Liu, “A Hybrid Hysteresis Compensation of Hysteresis Observer and Preisach Model Estimator for Pizeo-actuated Stage,” Master thesis, Department of Mechanical Engineering, National Taiwan University, 2015. | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/50904 | - |
dc.description.abstract | 壓電制動器具備高位移解析度以及良好之動態響應性能,因此被廣泛應用於精密定位系統。然而,以壓電材料製成之驅動器在輸入電壓以及位移間含有遲滯所造成之非線性現象,造成控制上的困難,使其定位控制之精確度受到限制。
本論文將遲滯效應所造成的非線性現象與線性的機械系統做解耦,並針對遲滯造成的非線性消耗做補償,使遲滯對系統所造成的影響線性化,進而提升控制之精確度。依據文獻中提出的電荷控制架構,已知流經壓電制動器之電荷量與其伸長量呈線性關係,因此可藉串接於壓電制動器之電容量測電荷量進而得知遲滯所造成的電壓消耗,並以此建立遲滯補償器以利補償其非線性效應。本論文提出在不同操作頻率之下所產生不同的遲滯非線性現象之變動量,可由建構之靜態遲滯模型,以其變動量之倍數變化逼近,以簡易且快速之方式消除不同頻率下遲滯所產生之非線性影響。遲滯補償機制只用於遲滯現象線性化而不參與任何的位置控制,因此在設計上,位置控制器與遲滯補償兩者各自獨立。而位置控制器只需針對補償後剩餘之線性機械系統做控制設系,此法可大幅簡化控制演算之複雜度。壓電制動器之模型與分析、參數識別、Preisach模型之建構、將在本論文中介紹與討論。最後佐以不同控制頻率下之驗證結果。 | zh_TW |
dc.description.abstract | With high resolution and high dynamics response, piezo-actuator is widely used in precision position control system. However, there is nonlinear effect caused by hysteresis phenomenon between input voltage and displacement of the piezo-actuator which increase the difficulty for control, thus degrades the precision of control result. In this thesis, the nonlinearity caused by hysteresis phenomenon is decoupled with the linear mechanic system. And hysteresis compensation is implemented to linearize the hysteresis phenomenon for the sake of enhancing the control performance.Referring to the charge control structure proposed by L.S. Chen et al., it is shown that the relationship between charge flowing through the piezo-actuator and its elongation is linear. Therefore, by measuring the charge flowing through the piezo-actuator, the voltage consumption caused by the hysteresis can be obtained and the hysteresis compensator can be built to compensate the nonlinear effect. It is asserted that in this thesis that the differences of the hysteresis caused by different operating frequencies can be compensated by modifying the differences of the static hysteresis model. By this simple and fast method, the nonlinearity caused by the hysteresis phenomenon under different frequencies can be eliminated. The hysteresis compensation is only used for hysteresis linearization but not for position control. Therefore, the designs of tracking controller and hysteresis compensator are independent. While designing the tracking controller, the system can be regarded as a linear mechanic system after being compensated. By doing this, the complexity of control algorism can be reduced. For validity, a series of experiments under several frequencies are implemented in this thesis. | en |
dc.description.provenance | Made available in DSpace on 2021-06-15T13:05:35Z (GMT). No. of bitstreams: 1 ntu-105-R03522842-1.pdf: 3055810 bytes, checksum: b4444749962b3502b79814fe703ca0c9 (MD5) Previous issue date: 2016 | en |
dc.description.tableofcontents | 口試委員會審定書 #
致謝 i 摘要 ii ABSTRACT iii CONTENTS iv LIST OF FIGURES vii LIST OF TABLES xii Nomenclature xiii Chapter 1 Introduction 1 1.1 Motivation 1 1.2 Literature Review 1 1.3 Contributions 3 Chapter 2 Hardware Introduction 4 2.1 Piezo-actuated Stage 4 2.2 Displacement Measurement System 5 2.2.1 Overall Structure of Laser Interferometer System 5 2.2.2 Laser Path and the Operating Principle of Interferometer 7 2.3 Hardware and Software of Servo Control System 11 2.3.1 Hardware Architecture 11 2.3.2 Software-hardware integration 13 Chapter 3 System Description 15 3.1 Mechanical Structure 15 3.2 Electro-Mechanical Model of Piezo-actuated System 16 3.2.1 Piezo-actuator model 16 3.2.2 System Decoupling 19 3.2.3 Dynamic Characteristic of Electromechanical System 21 3.3 Overall System 23 Chapter 4 Hysteresis Description 25 4.1 Hysteresis phenomenon 25 4.1.1 Hysteresis phenomena under signals of different frequencies. 25 4.1.2 Hysteresis phenomena under signals of different velocities. 26 4.2 Preisach Model of Hysteresis 27 4.2.1 Model Description 27 4.2.2 Preisach Model 32 Chapter 5 Parameter and System ID 34 5.1 Parameter ID 34 5.1.1 Estimation of the Equivalent Stiffness 34 5.1.2 Identification of the transformation ratio 36 5.2 Transfer Function ID 38 5.2.1 Preparation of System Identification 38 5.2.2 Identification Results 39 5.3 Hysteresis ID 42 Chapter 6 Control Method 48 6.1 Overall Control Scheme 48 6.2 Measurement-based Hysteresis Observer 49 6.3 Linearization Method 51 6.4 Outer Loop Tracking Controller 54 6.4.1 Tracking Controller 54 6.4.2 Feedback Filter 55 6.5 Stability Analysis 56 Chapter 7 Experimental Validity 58 7.1 Hysteresis Linearization 58 7.2 Without Hysteresis Linearization 60 7.2.1 Control Result: Stair Signal 61 7.2.2 Control Result: 1.2sin(30Hz) 62 7.2.3 Control Result: 1.2sin(60Hz) 63 7.2.4 Control Result: 1.2sin(100Hz) 64 7.3 Hysteresis linearization 65 7.3.1 Hysteresis Linearization: Stair signal 66 7.3.2 Hysteresis Linearization: 1.2sin(30Hz) 67 7.3.3 Hysteresis Linearization: 1.2sin(60Hz) 68 7.3.4 Hysteresis Linearization: 1.2sin(100Hz) 69 7.4 Comparison to other methods 71 7.4.1 Comparing with Disturbance Observer Based Hysteresis Observer 71 7.4.2 Comparing with Charge Feedback Control 73 7.4.3 Comparing with Hybrid Hysteresis Compensation of Hysteresis Observer and Preisach Model Estimator 75 7.4.4 Comparing with Direct Inverse Hysteresis Model Compensation 78 Chapter 8 Conclusions and Future Work 79 REFERENCE 81 | |
dc.language.iso | en | |
dc.title | 頻率在遲滯現象的影響與其控制理論 | zh_TW |
dc.title | Frequency effect on the hysteresis phenomenon and its control strategy | en |
dc.type | Thesis | |
dc.date.schoolyear | 104-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 葉哲良,劉書宏 | |
dc.subject.keyword | 壓電制動器,遲滯補償,遲滯模型, | zh_TW |
dc.subject.keyword | piezo-actuator,hysteresis compensation,hysteresis model, | en |
dc.relation.page | 84 | |
dc.identifier.doi | 10.6342/NTU201600687 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2016-07-05 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
顯示於系所單位: | 機械工程學系 |
文件中的檔案:
檔案 | 大小 | 格式 | |
---|---|---|---|
ntu-105-1.pdf 目前未授權公開取用 | 2.98 MB | Adobe PDF |
系統中的文件,除了特別指名其著作權條款之外,均受到著作權保護,並且保留所有的權利。