Browsing by Author 林耕漢
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Publication Year | Title | Author(s) | Department |
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2012 | 利用原子層沉積技術成長二氧化鈦及氧化鋁複合氧化層-應用於金氧半電容元件之研究 Study of Metal-Oxide-Semiconductor Capacitors with Titanium Aluminum Oxide Gate Dielectrics Grown by Atomic Layer Deposition | Keng-Han Lin; 林耕漢 | 材料科學與工程學研究所 |